Accession Number : ADA188137
Title : Development of a Planar Heterojunction Bipolar Transistor for Very High Speed Logic.
Descriptive Note : Final rept. 1 Oct 84-30 Jun 87,
Corporate Author : CALIFORNIA UNIV SANTA BARBARA DEPT OF ELECTRICAL AND COMPUTER ENGINEERING
Personal Author(s) : Long, Stephen I ; Kroemer, Herbert ; Rao, M A
PDF Url : ADA188137
Report Date : 10 Oct 1987
Pagination or Media Count : 116
Abstract : The following describes the results of research on III-V molecular beam epitaxial (MBE) growth, material characterization and the fabrication of heterostructure bipolar transistors (HBT) for very-high-speed logic applications. Work on the InGaP/GaAs heterojunction (HJ) was completed. Isotype HJs were grown and evaluated by a CV reconstruction method in order to determine the energy band offsets. It was found that delta Ec = 0.22 eV and delta Ev = 0.24 eV for the lattice matched composition. An inverted AlGaAs/GaAs HBT was investigated, and it was shown that an undoped, graded region between emitter and base would eliminate the conduction band spike and provide a buffer for Be diffusion. A new direction toward improvement in performance and fabrication techniques for the AlGaAs/GaAs HBT was successfully demonstrated. Graded-bandgap nonalloyed ohmic contacts using n+ InAs for the AlGaAs emitter and p+ GaSb for the GaAs base were provided by selective epitaxial regrowth. The MBE growth conditions for grading from GaAs to InAs and GaAs to GaSb were determined. Low specific contact resistances were observed for both contact types. A self-aligned AlGaAs/GaAs HBT with graded-gap contacts to both base and emitter was demonstrated.
Descriptors : *BIPOLAR TRANSISTORS, *ELECTRIC CONTACTS, *GALLIUM ARSENIDES, *GROUP III COMPOUNDS, *GROUP V COMPOUNDS, *HETEROJUNCTIONS, *MOLECULAR BEAMS, ENVIRONMENTS, GROWTH(GENERAL), HIGH VELOCITY, LOGIC, PLANAR STRUCTURES, RESISTANCE
Subject Categories : Electrical and Electronic Equipment
Solid State Physics
Electricity and Magnetism
Distribution Statement : APPROVED FOR PUBLIC RELEASE