Accession Number : ADA188313
Title : X-Ray Lithographic Research: A Collection of NRL Contributions.
Descriptive Note : Final rept.,
Corporate Author : NAVAL RESEARCH LAB WASHINGTON DC
Personal Author(s) : Whitlock, Robert R
PDF Url : ADA188313
Report Date : 24 Aug 1987
Pagination or Media Count : 170
Abstract : Examined are x-ray and ultraviolet lithographic methods for the microfabrication of fine-line features, with particular emphasis on the use of high temperature plasmas as x-ray sources. Out of this work has come a series of scientific presentations and publications generated by a group of scientists at the Naval Research Laboratory, in collaboration with their coworkers at other institutions. These publications are collected under one cover in this report. Keywords: Radiation effects; Lasers; Exposure(General); Laser target interactions.
Descriptors : *LITHOGRAPHY, *X RAYS, *PHOTOLITHOGRAPHY, HIGH TEMPERATURE, LASER TARGET INTERACTIONS, PLASMAS(PHYSICS), RADIATION EFFECTS, ULTRAVIOLET RADIATION, NAVAL RESEARCH
Subject Categories : Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE