Accession Number : ADA190515

Title :   Nondestructive Moisture Measurement in Microelectronics.

Descriptive Note : Final rept. Sep 85-Aug 86,

Corporate Author : CLARKSON UNIV POTSDAM NY DIV OF RESEARCH

Personal Author(s) : Kane, Didier ; Domingos, Henry

PDF Url : ADA190515

Report Date : Dec 1987

Pagination or Media Count : 54

Abstract : This project was aimed at understanding moisture induced effects on materials used in microelectronic device manufacture. The approach chosen has been the use of state-of-the-art interdigitated surface conductivity test structures for characterizing the responses of microelectronic materials to ambient and condensed moisture, by performing nondestructive moisture measurements on both hermetically sealed and delidded packages. A test chamber and an appropriate electrical test setup have been developed for assessing the specificity, reproducibility and sensitivity of these effects. Keywords: Moisture, Surface conductivity sensor, Nondestructive measurements, Adsorption physical models.

Descriptors :   *ADSORPTION, *MICROELECTRONICS, *MOISTURE, *NONDESTRUCTIVE TESTING, CHAMBERS, CONDUCTIVITY, DETECTORS, ELECTRICAL PROPERTIES, MATERIALS, MEASUREMENT, MODELS, PHYSICAL PROPERTIES, REPRODUCIBILITY, RESPONSE, SURFACES, TEST FACILITIES

Subject Categories : Test Facilities, Equipment and Methods
      Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE