Accession Number : ADA190515
Title : Nondestructive Moisture Measurement in Microelectronics.
Descriptive Note : Final rept. Sep 85-Aug 86,
Corporate Author : CLARKSON UNIV POTSDAM NY DIV OF RESEARCH
Personal Author(s) : Kane, Didier ; Domingos, Henry
PDF Url : ADA190515
Report Date : Dec 1987
Pagination or Media Count : 54
Abstract : This project was aimed at understanding moisture induced effects on materials used in microelectronic device manufacture. The approach chosen has been the use of state-of-the-art interdigitated surface conductivity test structures for characterizing the responses of microelectronic materials to ambient and condensed moisture, by performing nondestructive moisture measurements on both hermetically sealed and delidded packages. A test chamber and an appropriate electrical test setup have been developed for assessing the specificity, reproducibility and sensitivity of these effects. Keywords: Moisture, Surface conductivity sensor, Nondestructive measurements, Adsorption physical models.
Descriptors : *ADSORPTION, *MICROELECTRONICS, *MOISTURE, *NONDESTRUCTIVE TESTING, CHAMBERS, CONDUCTIVITY, DETECTORS, ELECTRICAL PROPERTIES, MATERIALS, MEASUREMENT, MODELS, PHYSICAL PROPERTIES, REPRODUCIBILITY, RESPONSE, SURFACES, TEST FACILITIES
Subject Categories : Test Facilities, Equipment and Methods
Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE