Accession Number : ADA190796
Title : UV-Laser Reactions of Molecular Adsorbates.
Descriptive Note : Final rept. 21 Aug 84-20 Aug 87,
Corporate Author : MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB
Personal Author(s) : Ehrlich, D J ; Rothschild, M
PDF Url : ADA190796
Report Date : 27 Dec 1987
Pagination or Media Count : 6
Abstract : A technique has been developed for determining the surface diffusivity of a weakly bound adsorbate. Electron-beam-induced changes in the structure of partially amorphous CdS surfaces have been observed directly with atomic resolution. The interaction between a visible laser beam and compound semiconductors was studied; a dynamic light-guiding effect which leads to the formation of single mode slab waveguides was identified. Thin films and single crystals of metal oxides were deposited by laser-induced photochemical reactions in gas-phase and adsorbed molecules. A surface halogenation techniques was developed for the photochemical etching of refractory metal films and was applied to in situ tuning of millimeter wave circuits. Laser-induced deposition of high purity tungsten was demonstrated and was applied to multi-level metallization and restructing of circuits. Keywords: Lasers , Photochemistry, Surface reactions, Adsorbates, Etching, Metals, Semiconductors.
Descriptors : *ETCHING, *PHOTOCHEMICAL REACTIONS, *SEMICONDUCTORS, *CIRCUITS, ADSORPTION, MOLECULES, ATOMIC PROPERTIES, RESOLUTION, LASERS, METALS, ADSORBATES, METALLIZING, HIGH RATE, PURITY, TUNGSTEN, DEPOSITION, OXIDES, MILLIMETER WAVES, ULTRAVIOLET LASERS, DEPOSITION, WAVEGUIDES, SURFACE REACTIONS, TUNING, REFRACTORY METALS, SINGLE CRYSTALS, DIFFUSIVITY, SURFACES, THIN FILMS, VISIBLE SPECTRA
Subject Categories : Radiation and Nuclear Chemistry
Electrical and Electronic Equipment
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE