Accession Number : ADA191240

Title :   Thin Film Research Diagnostics Instrumentation.

Descriptive Note : Final rept. 1 Jan 85-30 Jun 86,

Corporate Author : NEW MEXICO UNIV ALBUQUERQUE

Personal Author(s) : McNeil,

PDF Url : ADA191240

Report Date : 21 Oct 1987

Pagination or Media Count : 3

Abstract : All equipment purchased under this contract has been used for deposition and analysis of thin films. In particular, the Ar-ion laser is being used to investigate film scatter at multiple wavelengths. The excimer laser is being used to enhance deposition mechanisms; it illuminates a coated surface throughout film disposition. The microscope and ellipsometer are part of diagnostics used to analyze films.

Descriptors :   *DEPOSITION, *THIN FILMS, COATINGS, ELLIPSOMETERS, EXCIMERS, FILMS, FREQUENCY, LASERS, SCATTERING, SURFACES

Subject Categories : Inorganic Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE