Accession Number : ADA191240
Title : Thin Film Research Diagnostics Instrumentation.
Descriptive Note : Final rept. 1 Jan 85-30 Jun 86,
Corporate Author : NEW MEXICO UNIV ALBUQUERQUE
Personal Author(s) : McNeil,
PDF Url : ADA191240
Report Date : 21 Oct 1987
Pagination or Media Count : 3
Abstract : All equipment purchased under this contract has been used for deposition and analysis of thin films. In particular, the Ar-ion laser is being used to investigate film scatter at multiple wavelengths. The excimer laser is being used to enhance deposition mechanisms; it illuminates a coated surface throughout film disposition. The microscope and ellipsometer are part of diagnostics used to analyze films.
Descriptors : *DEPOSITION, *THIN FILMS, COATINGS, ELLIPSOMETERS, EXCIMERS, FILMS, FREQUENCY, LASERS, SCATTERING, SURFACES
Subject Categories : Inorganic Chemistry
Distribution Statement : APPROVED FOR PUBLIC RELEASE