Accession Number : ADA191978
Title : Laser-Assisted Chemical Reactions of Organometallic Complexes at Surfaces.
Descriptive Note : Final rept. Aug 81-Aug 87,
Corporate Author : HUGHES RESEARCH LABS MALIBU CALIF CHEMICAL PHYSICS DEPT
Personal Author(s) : Jensen, John E
PDF Url : ADA191978
Report Date : 15 Feb 1988
Pagination or Media Count : 4
Abstract : The objectives of this research program are to investigate laser-assisted chemical reactions involving organometallic complexes for deposition of electronic materials at low temperatures. Specific areas of investigation are to (1) elucidate the kinetics and mechanisms of the photophysical and photochemical processes operative during laser-simulated dissociation of organometallic complexes and subsequent reaction of the photoproducts with a surface, (2) apply studies of photo-induced processes to the deposition of semiconductors, such as Gallium Arsenide, Aluminum Arsenide, and Gallium Aluminum Arsenide, and conductors such as Gold, and (3) establish experimental conditions under which epitaxial growth of the deposited materials can be achieved.
Descriptors : *ORGANOMETALLIC COMPOUNDS, *PHOTOCHEMICAL REACTIONS, *SURFACES, ALUMINUM ARSENIDES, DEPOSITION, ELECTRONIC EQUIPMENT, EPITAXIAL GROWTH, GALLIUM ARSENIDES, LOW TEMPERATURE, MATERIALS, PHYSICAL PROPERTIES, SEMICONDUCTORS
Subject Categories : Inorganic Chemistry
Distribution Statement : APPROVED FOR PUBLIC RELEASE