Accession Number : ADA192959

Title :   Equipment for Building and Testing Superconductive Flux Flow Electronic Devices.

Descriptive Note : Final rept. 1 Nov 86-30 Nov 87,

Corporate Author : WISCONSIN UNIV-MADISON DEPT OF ELECTRICAL AND COMPUTER ENGINEERING

Personal Author(s) : Nordman, James E ; Beyer, James B

PDF Url : ADA192959

Report Date : 30 Nov 1987

Pagination or Media Count : 4

Abstract : The equipment authorized by the grant is a thin film vacuum deposition system containing provisions for ion beam and magnetron sputter deposition and for ion beam etching.

Descriptors :   *ETCHING, *SPUTTERING, *VACUUM DEPOSITION, DEPOSITION, ION BEAMS, MAGNETRONS, THIN FILMS, SUPERCONDUCTORS, RESEARCH FACILITIES

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE