Accession Number : ADA195332
Title : Crystallinity of RF-Sputtered MoS2 Films.
Descriptive Note : Technical rept.,
Corporate Author : AEROSPACE CORP EL SEGUNDO CA CHEMISTRY AND PHYSICS LAB
Personal Author(s) : Lince, Jeffrey R ; Fleischauer, Paul D
PDF Url : ADA195332
Report Date : 15 Apr 1988
Pagination or Media Count : 42
Abstract : The crystallinity and morphology of thin, radio-frequency (rf)-sputtered MoS2 films deposited on 440C stainless steel substrates at both ambient (approx. 70 C) and high temperatures (245 C) were studied by scanning electron microscopy (SEM) and by x ray diffraction (Read thin film photography and 0-20 scans). Under SEM, the films exhibited a 'ridgelike' (or platelike) formation region for thicknesses between 0.18 and 1.0 micrometer MoS2. X-ray diffraction was shown to give more detailed and accurate information than electron diffraction previously used for elucidating the structure of sputtered lubricant films. Keywords: Solid lubricant films, Molybdenum disulfide, Radio frequency sputtering, Thin film stress, Lattice defects, X ray diffraction.
Descriptors : *MOLYBDENUM COMPOUNDS, *SPUTTERING, *SULFIDES, *THIN FILMS, ELECTRON MICROSCOPY, ELECTRONIC SCANNERS, ELECTRONS, FILMS, LUBRICATING FILMS, PHOTOGRAPHY, SOLID LUBRICANTS, SOLIDS, STRESSES, X RAY DIFFRACTION, PRODUCTION, CRYSTALLIZATION, PHOTOMICROGRAPHY
Subject Categories : Fabrication Metallurgy
Distribution Statement : APPROVED FOR PUBLIC RELEASE