Accession Number : ADA195694

Title :   Electronic Materials and Devices Prepared by Molecular Beam Epitaxy.

Descriptive Note : Final rept. Nov 86-Sep 87,

Corporate Author : ILLINOIS UNIV AT URBANA COORDINATED SCIENCE LAB

Personal Author(s) : Morkoc, Hadis

PDF Url : ADA195694

Report Date : 27 Apr 1988

Pagination or Media Count : 6

Abstract : Six Perkin Elmer 430P III-V MBE Systems and a PE Si MBE with appropriate transfer tubes for a totally interconnected MBE Complex has been purchased and installation has begun. The complex is located in the Coordinated Science Laboratory in Room 200 with the majority of administrative role being played by MRL. In this complex, two III-V MBE systems and a transfer tube (13 feet long) and the associated assortment of equipment has been paid for by funds obtained from AFOSR. These growth chambers have been termed as 'Growth Reactors A & B', with the transfer tube being called' 1 Tube'. The systems are presently in CSL Room 200 which has been remodeled for this purpose and we are in the process of installing them. Epitaxial growth, Molecular beams. (mjm)

Descriptors :   CHAMBERS, ELECTRONIC EQUIPMENT, EPITAXIAL GROWTH, GROUP III COMPOUNDS, GROUP V COMPOUNDS, GROWTH(GENERAL), LABORATORIES, MANAGEMENT, MATERIALS, MOLECULAR BEAMS, TRANSFER, TUBES

Subject Categories : Crystallography
      Inorganic Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE