Accession Number : ADA197483
Title : Metallo-Organic Decomposition Process for Dielectric Films.
Descriptive Note : Annual rept. 1 Apr 87-31 Mar 88,
Corporate Author : PURDUE UNIV LAFAYETTE IN TURNER LAB FOR ELECTROCERAMICS
Personal Author(s) : Vest, R. W. ; Vest, G. M. ; Shaikh, A. S. ; Liedl, G. L.
Report Date : 15 JUN 1988
Pagination or Media Count : 90
Abstract : The metallo-organic decomposition (MOD) process is a technique for producing inorganic films without processing in vacuum or going through a powder step. The processing starts with metallo-organic compounds of the desired elements dissolved in appropriate solvents. A metallo-organic compound is one in which a metal atom is bonded to a hetero atom which in turn is bonded to an organic radical. These solutions of individual metallo-organic compounds are then mixed in the appropriate ratio to give the desired cation stoichiometry for the final film to produce a formulation, which is itself a true solution. This formulation is deposited on a substrate by any of a variety of techniques to produce a wet film, which is then heated to first remove the solvent and then to decompose the metallo-organic compounds to produce an inorganic film. (jes)
Descriptors : *DECOMPOSITION, *DIELECTRIC FILMS, FILMS, HETEROJUNCTIONS, INORGANIC MATERIALS, METALS, ORGANOMETALLIC COMPOUNDS, STOICHIOMETRY.
Subject Categories : Electricity and Magnetism
Properties of Metals and Alloys
Distribution Statement : APPROVED FOR PUBLIC RELEASE