Accession Number : ADA207673

Title :   Dissolution Rates of Poly(Methyl Methacrylate) in Mixtures of Non-Solvents.

Descriptive Note : Technical rept.,

Corporate Author : CORNELL UNIV ITHACA SCHOOL OF CHEMICAL ENGINEERING

Personal Author(s) : Groele, R J ; Krasicky, P D ; Chun, S -W ; Sullivan, J ; Rodriguez, F

PDF Url : ADA207673

Report Date : 12 May 1989

Pagination or Media Count : 22

Abstract : As predicted by thermodynamic studies of polymer conformation, high molecular weight poly(methyl methacrylate), PMMA, dissolves cleanly, and at a constant rate, in a 7:3 mixture of 1-butanol and acetonitrile although neither liquid is a solvent for PMMA by itself. Mixtures of other alcohols with acetonitrile also dissolve PMMA. When mixture with the same fraction of acetonitrile are compared, methanol dissolves PMMA almost twice as fast, ethanol and hexanol at about the same rate, and 2-propanol somewhat more slowly than the 1-butanol mixture with acetonitrile. The measurements of dissolution rate were made using a laser interferometer at 20 C. Keywords: Microlithography, Resists, Poly(methyl methacrylate). (aw)

Descriptors :   *POLYMETHYL METHACRYLATE, *REACTION KINETICS, *DISSOLVING, ACETONITRILE, ALCOHOLS, CARBINOLS, CONFORMITY, LASERS, MICROSCOPY, OPTICAL INTERFEROMETERS, PHOTOLITHOGRAPHY, POLYMERS, RATES, THERMODYNAMICS

Subject Categories : Plastics
      Physical Chemistry
      Polymer Chemistry
      Industrial Chemistry and Chemical Processing
      Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE