Accession Number : ADA251028

Title :   Tunneling Acoustic Microscopy.

Descriptive Note : Technical rept. 1 Apr 91-31 Mar 92,

Corporate Author : STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS

Personal Author(s) : Quate, C. F. ; Khuri-Yakub, B. T.

Report Date : MAY 1992

Pagination or Media Count : 7

Abstract : We have microfabricated an integrated 1 GHz ultrasonic transducer and sharp silicon tip for use as a scanning near-field acoustic microscope probe. The silicon tip, which has a 500 A radius of curvature, is microfabricated using a batch fabrication process compatible with integrated circuit manufacturing techniques. The ZnO ultrasonic transducer is integrally fabricated at the base of the tip to allow sound waves to be transmitted longitudinally down the tip. The microscope is configured such that the tip is brought into close proximity of a sample which has a receiving acoustic transducer. Two-dimensional imaging is accomplished by raster scanning the tip over the sample while feeding back on the total transmitted acoustic power to keep the tip/sample separation constant.

Descriptors :   *MICROSCOPY, *TUNNELING, ZINC OXIDES, MANUFACTURING, FABRICATION.

Subject Categories : Atomic and Molecular Physics and Spectroscopy

Distribution Statement : APPROVED FOR PUBLIC RELEASE