Accession Number : ADA289131

Title :   Surface Damage Effects Generated by a Fast-Pulse Laser Beam.

Corporate Author : NAVAL RESEARCH LAB WASHINGTON DC

Personal Author(s) : Burkhalter, P. G. ; Konnert, J. H. ; Gabl, E. F.

PDF Url : ADA289131

Report Date : 06 DEC 1994

Pagination or Media Count : 15

Abstract : A fast-pulse laser was used to induce damage on the surface of a polished silicon wafer. Effects of focused-laser heating at threshold for damage were examined with high-resolution imaging microscopes. The extent and characteristics of various ripple structure were measured with an atomic force microscope.

Descriptors :   *DAMAGE, *LASER BEAMS, *SURFACE PROPERTIES, *PULSES, MEASUREMENT, STRUCTURES, PULSED LASERS, HIGH RESOLUTION, SURFACES, SILICON, HEATING, IMAGES, RIPPLES, WAFERS, MICROSCOPES, ATOMIC PROPERTIES, SHORT PULSES, PULSE DURATION MODULATION.

Subject Categories : Physical Chemistry
      Inorganic Chemistry
      Lasers and Masers
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE