Accession Number : ADA289131
Title : Surface Damage Effects Generated by a Fast-Pulse Laser Beam.
Corporate Author : NAVAL RESEARCH LAB WASHINGTON DC
Personal Author(s) : Burkhalter, P. G. ; Konnert, J. H. ; Gabl, E. F.
PDF Url : ADA289131
Report Date : 06 DEC 1994
Pagination or Media Count : 15
Abstract : A fast-pulse laser was used to induce damage on the surface of a polished silicon wafer. Effects of focused-laser heating at threshold for damage were examined with high-resolution imaging microscopes. The extent and characteristics of various ripple structure were measured with an atomic force microscope.
Descriptors : *DAMAGE, *LASER BEAMS, *SURFACE PROPERTIES, *PULSES, MEASUREMENT, STRUCTURES, PULSED LASERS, HIGH RESOLUTION, SURFACES, SILICON, HEATING, IMAGES, RIPPLES, WAFERS, MICROSCOPES, ATOMIC PROPERTIES, SHORT PULSES, PULSE DURATION MODULATION.
Subject Categories : Physical Chemistry
Lasers and Masers
Distribution Statement : APPROVED FOR PUBLIC RELEASE