Accession Number : ADA289340

Title :   Silicon Based Microactuators for Telerobotic Tactile Stimulation.

Descriptive Note : Master's thesis,

Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING

Personal Author(s) : Read, Britton C., III

PDF Url : ADA289340

Report Date : DEC 1994

Pagination or Media Count : 194

Abstract : Silicon based microelectromechanical (MEM) devices using both surface and bulk micromachining have been realized to provide tactile stimulation. The bulk MEM devices utilize the bimorph principle and are fabricated in a complementary metal oxide semiconductor (CMOS) process through MOS implementation system (MOSIS). The surface MEM devices utilize the electrostatic principle and are fabricated ina complementary metal oxide semiconductor (CMOS) process through MOS implementation system (MOSIS). The surface MEM devices utilize the electrostatic principle and are fabricated in the multi-user MEM process (MUMPS) through MCNC. Eleven major designs are presented and tested to determine if they are suitable to provide tactile stimulation. The bimorph and electrostatic designs were tested using a probe station, a laser interferometer, and a force tester. Measurements were taken on the deflections, cutoff frequencies, and loaded operation of the devices. The bimorph designs fabricated in the CMOS process showed the most potential. The tests results indicate that the cantilever beam designs deflect over 30 microns. They operate at frequencies below 130 Hz. The devices operate under a load of approximately 5 microN. An endurance test was performed by actuating a device over 2.5 million times.

Descriptors :   *STIMULATION(PHYSIOLOGY), *SILICON, *TOUCH, *ACTUATORS, TEST AND EVALUATION, STATIONS, PROBES, MACHINING, DEFLECTION, LASERS, METAL OXIDE SEMICONDUCTORS, ENDURANCE(GENERAL), OPTICAL INTERFEROMETERS, OPERATION, COMPLEMENTARY METAL OXIDE SEMICONDUCTORS, ELECTROSTATICS, CANTILEVER BEAMS.

Subject Categories : Inorganic Chemistry
      Anatomy and Physiology
      Electrical and Electronic Equipment
      Cybernetics

Distribution Statement : APPROVED FOR PUBLIC RELEASE