Accession Number : ADA292463

Title :   Nanofabrication of Electronic Devices With the Scanning Tunneling Microscope.

Descriptive Note : Final technical rept. 1 Nov 92-31 Oct 94,

Corporate Author : TEXAS UNIV AT AUSTIN

Personal Author(s) : De Lozanne, Alejandro

PDF Url : ADA292463

Report Date : 31 OCT 1994

Pagination or Media Count : 4

Abstract : This grant represents one year of funding plus a one-year, no-cost extension. The main achievements were: (1) Development of a new technique for imaging rapidly with the STM. (2) The reproducibility of the writing process was improved dramatically. (3) Commercial STM electronics were adapted to our STM. (4) Fabrication of the smallest continuous metallic lines to date: 24 nm wide. (5) Design and construction of a compact STM for nanofabrication. These main points are described briefly below and in more detail in the publications listed at the end. Other groups have followed our lead in using the STM to break down precursor gases to make nanoscale deposits, namely Matsui's group at NBC in Tsukuba, Japan, Kent's group at IBM Yorktown (now at New York University), Behm's group in Munchen, Germany, and Nayfeh's group at U. Illinois. This technique is therefore likely to become more important over the next decade. jg p.2

Descriptors :   *SCANNING ELECTRON MICROSCOPES, *TUNNELING(ELECTRONICS), *ELECTRONIC EQUIPMENT, METALS, PRECURSORS, FABRICATION, GASES, COSTS, IMAGES, WRITING, REPRODUCIBILITY.

Subject Categories : Optics
      Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE