Accession Number : ADA293009
Title : An Analysis of Gas Phase Ethanol/Water Chemistry for Diamond CVD,
Corporate Author : NAVAL RESEARCH LAB WASHINGTON DC
Personal Author(s) : Sinkovits, Robert S. ; DeVore, RIchard C. ; Shamamian, Vasgen A. ; Westbrook, Charles K.
PDF Url : ADA293009
Report Date : 29 MAR 1995
Pagination or Media Count : 46
Abstract : Chemical kinetics calculations have been carried out on ethanol (EtOH)water mixtures at a range of temperatures, pressures snd EtOH/H2O ratios. The results show that the mole fractions of many chemical species depend very sensitively on the initial EtOH/H20 ratio and diverge sharply after an induction time which depends both on pressure and temperature. We explain this divergence primarily in terms of the stability of carbon monoxide and show that the rate-limiting steps that dictate the induction time are the molecular hydrogen dissociation reactions. Our calculations also predict the dependence of the concentrations of potential growth (C, CH3, C2H2) and etching (O, OH, O2) species for diamond chemical vapor deposition (CVD) on operating conditions. jg
Descriptors : *DIAMONDS, *CHEMICAL VAPOR DEPOSITION, *PHASE, *GAS FLOW, *ETHANOLS, *WATER CHEMISTRY, TEMPERATURE, STABILITY, COMPUTATIONS, REACTION KINETICS, METHYL RADICALS, GROWTH(GENERAL), ETCHING, HYDROGEN, MIXTURES, TIME, OXYGEN, CARBON MONOXIDE, DISSOCIATION, MOLECULAR PROPERTIES, CONCENTRATION(CHEMISTRY), INDUCTION SYSTEMS, HYDROXYL RADICALS.
Subject Categories : Inorganic Chemistry
Distribution Statement : APPROVED FOR PUBLIC RELEASE