Accession Number : ADA294109
Title : Semiconductor Process Synthesis. Virtual Reactor and Recipe Synthesis Frameworks for Rapid Equipment and Process Development.
Descriptive Note : Final rept.,
Corporate Author : CVC PRODUCTS INC FREMONT CA
Personal Author(s) : Moslehi, Mehrdad M.
PDF Url : ADA294109
Report Date : 02 APR 1995
Pagination or Media Count : 33
Abstract : In this Phase I program, we developed modules and strategy for a Virtual Reactor (VR) Framework and a recipe Synthesizer (RS) Framework for single-wafer thermal processing equipment. These frameworks constitute components of the Unit Process & Module Synthesis System. This system enables equipment and process engineers to quickly design fabrication equipment and synthesize unit processes and modules in response to requirements generated by the flow synthesis framework. The first step in this methodology is to identify the unit processes associated with the modules. Integration design rules, equipment constraints, cost, performance, reliability and yield requirements will then be used to establish the equipment and unit process specifications. Unit processes and associated modules will be synthesized based on these specifications and verified through simulated and actual silicon runs. The design rules and process models will be established based upon the results from these runs. Finally, synthesized process modules will be incorporated into the module library. jg p.6
Descriptors : *PROCESSING EQUIPMENT, *SEMICONDUCTORS, THERMAL PROPERTIES, REQUIREMENTS, SPECIFICATIONS, SYNTHESIS, COMPUTERS, FABRICATION, MODULAR CONSTRUCTION, COSTS, RELIABILITY, INTEGRATION, SILICON, MODULES(ELECTRONICS), FLOW, WAFERS, HEAT, LIBRARIES.
Subject Categories : Electrical and Electronic Equipment
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE