Accession Number : ADA294259

Title :   Smart Spatial Light Modulator Research and Development.

Descriptive Note : Final rept. 30 Sep 92-31 Dec 94,

Corporate Author : CALIFORNIA UNIV SAN DIEGO LA JOLLA

Personal Author(s) : Lee, Sing H.

PDF Url : ADA294259

Report Date : 31 DEC 1994

Pagination or Media Count : 32

Abstract : The objective of this research was to demonstrate "smart" spatial light modulators (S-SLM's) or smart pixels where electronic circuits are combined with optoelectronic components (i.e, lasers, modulators, and detectors). S-SLM's are the key components for high-speed, massively-parallel optical and optoelectronic interconnects and computing systems. The integration of mature electronic and optoelectronic components allows electronic processing elements to enhance their performance to levels not achievable by pure electronic implementation. During the duration of the project, we devoted our efforts in developing scalable fabrication technologies that allow integration of ferroelectric ceramic and semiconductors (Si, GaAs); technologies developed and implemented were direct-bonding and low-temperature flip-chip bonding. We also evaluated the performance potential of ferroelectric thin film multilayer-based light modulator and electrically tunable wavelength filter. The direct bonded technology that we developed is simpler and much more scalable than previous epitaxial liftoff (ELO) and bonding technologies. We have successfully combined direct bonding and flip-chip bonding technologies to realize functional smart pixel structures consisting of a direct-bonded high voltage Si driver circuit array and flip- chip bonded optically-addressable foundry logic chip.

Descriptors :   *ELECTROOPTICS, *SPATIAL FILTERING, *LIGHT MODULATORS, *FLIP CHIPS, LOW TEMPERATURE, DETECTORS, ELECTRONIC EQUIPMENT, EPITAXIAL GROWTH, INTEGRATED CIRCUITS, SEMICONDUCTORS, ELECTRICAL PROPERTIES, CERAMIC MATERIALS, BONDED JOINTS, TUNING, BONDING, PIXELS, FERROELECTRIC MATERIALS, DRIVES(ELECTRONICS).

Subject Categories : Electrooptical and Optoelectronic Devices

Distribution Statement : APPROVED FOR PUBLIC RELEASE