Accession Number : ADA294292
Title : Experimental Studies of Sputtering on Zirconium Analyzed using Modified Roosandaal Sanders Theory.
Descriptive Note : Doctoral thesis,
Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH
Personal Author(s) : Schomber, Paul R.
PDF Url : ADA294292
Report Date : MAR 1995
Pagination or Media Count : 302
Abstract : An ion optics system utilizing a wein filter velocity selector has been modeled and characterized for use as an ion source for an instrument to measure high resolution angular distributions of sputtered neutral atoms. Laser induced fluorescence detection techniques are used to measure ground state and first excited state sputtering angular distributions on a polycrystalline zirconium foil using argon and nitrogen sputter gases. The incident ion beam impact angle has been varied from 15 deg to 75 deg as measured from surface normal and the wein filter velocity selector has been used to select N2+ and N+ ion beams from the nitrogen ion beam. The experimental data gathered are compared to Roosandaal Sanders analytical sputtering theory along with data on xenon and neon. Roosandaal Sanders theory reproduces the near surface normal sputtering behavior but rapidly breaks down as the incident ion beam impact angle moves toward the surface. Modifications to the Roosandaal Sanders equation to introduce adjustable fitting parameters and non-linear least squares fitting of the experimental data to these parameters has been accomplished. The results are discussed relating the fitting parameters to physical constants based in Roosandaal Sanders Theory. Discrepancies in the theory are addressed with extensive discussion on ion surface interaction. (MM)
Descriptors : *ION BEAMS, *ZIRCONIUM, *SPUTTERING, *ION BOMBARDMENT, COMPUTER PROGRAMS, OPTICAL DETECTION, LASER INDUCED FLUORESCENCE, THESES, ATOMS, HIGH RESOLUTION, NITROGEN, ANGLE OF INCIDENCE, OPTICAL FILTERS, PARTICLE COLLISIONS.
Subject Categories : Fabrication Metallurgy
Distribution Statement : APPROVED FOR PUBLIC RELEASE