Accession Number : ADA294510
Title : Compact, Self-Contained ArF Laser.
Descriptive Note : Final technical rept. 23 Sep 92-22 Dec 94,
Corporate Author : POTOMAC PHOTONICS INC LANHAM MD
Personal Author(s) : Christensen, C. P.
PDF Url : ADA294510
Report Date : 04 APR 1995
Pagination or Media Count : 16
Abstract : The goal of this project was development of a miniature ArF laser and associated miniature gas handling apparatus. In the first year we improved performance of a waveguide ArF laser by redesigning the microwave power delivery system, quantified the effects of oxygen in the laser discharge, and designed a miniaturized gas supply. In the second year. we developed a miniature ArF laser of more conventional design that produced mW of average power at a pulse repetition rate of 100 Hz. jg
Descriptors : *MICROWAVES, *ARGON LASERS, REPETITION RATE, WAVEGUIDES, GASES, OXYGEN, PULSE RATE, SUPPLIES, HANDLING, FLUORIDES, MINIATURIZATION, RADIOFREQUENCY POWER.
Subject Categories : Lasers and Masers
Radiofrequency Wave Propagation
Distribution Statement : APPROVED FOR PUBLIC RELEASE