Accession Number : ADA294516

Title :   Low Temperature Growth of Thin Films by High Kinetic Energy Supersonic Molecular Beams.

Descriptive Note : Final technical rept. 1 Mar 92-31 Oct 93,

Corporate Author : TEXAS UNIV AT AUSTIN

Personal Author(s) : Mullins, Charles B. ; Sellidj, Abdelkrim

PDF Url : ADA294516

Report Date : 24 FEB 1995

Pagination or Media Count : 8

Abstract : This grant initiated our work in low temperature deposition by supersonic jets. The attached draft manuscript details our work in growing GaAs thin films by jets of a single-source precursor and suggest that rapid growth and very smooth films can be attained. jg

Descriptors :   *LOW TEMPERATURE, *THIN FILMS, *MOLECULAR BEAMS, *KINETIC ENERGY, HIGH RATE, GROWTH(GENERAL), GALLIUM ARSENIDES, FILMS, DEPOSITION, SUPERSONIC FLOW, JET FLOW.

Subject Categories : Inorganic Chemistry
      Physical Chemistry
      Crystallography
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE