Accession Number : ADA294516
Title : Low Temperature Growth of Thin Films by High Kinetic Energy Supersonic Molecular Beams.
Descriptive Note : Final technical rept. 1 Mar 92-31 Oct 93,
Corporate Author : TEXAS UNIV AT AUSTIN
Personal Author(s) : Mullins, Charles B. ; Sellidj, Abdelkrim
PDF Url : ADA294516
Report Date : 24 FEB 1995
Pagination or Media Count : 8
Abstract : This grant initiated our work in low temperature deposition by supersonic jets. The attached draft manuscript details our work in growing GaAs thin films by jets of a single-source precursor and suggest that rapid growth and very smooth films can be attained. jg
Descriptors : *LOW TEMPERATURE, *THIN FILMS, *MOLECULAR BEAMS, *KINETIC ENERGY, HIGH RATE, GROWTH(GENERAL), GALLIUM ARSENIDES, FILMS, DEPOSITION, SUPERSONIC FLOW, JET FLOW.
Subject Categories : Inorganic Chemistry
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE