Accession Number : ADA294727

Title :   Thickness Distribution Measurement of Thin Films.

Corporate Author : NATIONAL AIR INTELLIGENCE CENTER WRIGHT-PATTERSON AFB OH

Personal Author(s) : Gu, Peifu

PDF Url : ADA294727

Report Date : 05 MAY 1995

Pagination or Media Count : 17

Abstract : Two calculated methods of film thickness of non cosine distribution and two measuring methods based on Fabry-Perot metal dielectric filters were presented. Some calculations and measurements were shown. (AN)

Descriptors :   *THICKNESS, *THIN FILMS, DISTRIBUTION, COMPARISON, REFRACTIVE INDEX, ZINC SULFIDES, SUBSTRATES, DIELECTRIC FILMS, FABRY PEROT INTERFEROMETERS, TRANSLATIONS, CALIBRATION, MAGNESIUM COMPOUNDS, CHINA, OPTICAL FILTERS, CHINESE LANGUAGE, SODIUM COMPOUNDS.

Subject Categories : Electrical and Electronic Equipment
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE