Accession Number : ADA294727
Title : Thickness Distribution Measurement of Thin Films.
Corporate Author : NATIONAL AIR INTELLIGENCE CENTER WRIGHT-PATTERSON AFB OH
Personal Author(s) : Gu, Peifu
PDF Url : ADA294727
Report Date : 05 MAY 1995
Pagination or Media Count : 17
Abstract : Two calculated methods of film thickness of non cosine distribution and two measuring methods based on Fabry-Perot metal dielectric filters were presented. Some calculations and measurements were shown. (AN)
Descriptors : *THICKNESS, *THIN FILMS, DISTRIBUTION, COMPARISON, REFRACTIVE INDEX, ZINC SULFIDES, SUBSTRATES, DIELECTRIC FILMS, FABRY PEROT INTERFEROMETERS, TRANSLATIONS, CALIBRATION, MAGNESIUM COMPOUNDS, CHINA, OPTICAL FILTERS, CHINESE LANGUAGE, SODIUM COMPOUNDS.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE