Accession Number : ADA296256

Title :   Conformal Temperature Sensors from Ion-Implanted Polymers,

Corporate Author : BREWER SCIENCE INC ROLLA MO

Personal Author(s) : Moss, Mary G. ; Kaufmann, James ; Giedd, Ryan E. ; Wang, Yonggiang

PDF Url : ADA296256

Report Date : 28 APR 1995

Pagination or Media Count : 23

Abstract : Previous work demonstrated the feasibility of forming thin-film, negative temperature coefficient, temperature sensors from ion implanted polymer films Semiconductive films of ion implanted polymers have the advantage that they can be applied to a variety of substrates, including flexible plastic, and patterned by conventional lithographic processes. One major advantage is their high degree of solvent and abrasion resistance. During Phase II, polymer and processing conditions which resulted in stable films were identified. Several types of devices were demonstrated: temperature sensors with 10-50 micrometer geometries, an IC incorporating an implanted thermistor as protection from overheating, and a temperature sensing array for measuring thermal gradients. Phase II results demonstrated that these materials have wide-ranging uses in the semiconductor industry for temperature sensing and applications based on resistance-temperature variations, such as vacuum measurement and bolometry. jg p.1

Descriptors :   *DETECTORS, *POLYMERS, *ION IMPLANTATION, *TEMPERATURE SENSITIVE ELEMENTS, *CONFORMAL STRUCTURES, MEASUREMENT, STABILITY, DETECTION, PROCESSING, THIN FILMS, VACUUM, FILMS, ARRAYS, INTEGRATED CIRCUITS, SUBSTRATES, LITHOGRAPHY, THERMISTORS, TEMPERATURE GRADIENTS, SOLVENTS, SEMICONDUCTING FILMS, TEMPERATURE COEFFICIENTS, PLASTICS, WEAR RESISTANCE, BOLOMETERS, ABRASION.

Subject Categories : Polymer Chemistry
      Electrical and Electronic Equipment
      Electricity and Magnetism
      Solid State Physics
      Thermodynamics

Distribution Statement : APPROVED FOR PUBLIC RELEASE