Accession Number : ADA296625

Title :   Low Voltage Electron Beam Lithography.

Descriptive Note : Progress rept. Apr-Jun 95,

Corporate Author : STANFORD UNIV CA CENTER FOR INTEGRATED SYSTEMS

Personal Author(s) : Liu, Weidong

PDF Url : ADA296625

Report Date : JUN 1995

Pagination or Media Count : 3

Descriptors :   *LITHOGRAPHY, *ELECTRON EMISSION, *PHOTOCATHODES, OPTIMIZATION, GALLIUM ARSENIDES, THIN FILMS, ELECTRON BEAMS, ELECTRON ENERGY, QUARTZ, ELECTRICAL RESISTANCE, CHROMIUM, LOW VOLTAGE.

Subject Categories : Electrical and Electronic Equipment
      Printing and Graphic Arts
      Nuclear Physics & Elementary Particle Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE