Accession Number : ADA297588

Title :   Tunneling Acoustic Microscopy.

Descriptive Note : Summary rept. 15 Jun 94-31 May 95,

Corporate Author : STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS

Personal Author(s) : Khuri-Yakub, B. T.

PDF Url : ADA297588

Report Date : 20 JUL 1995

Pagination or Media Count : 12

Abstract : The objectives of this research are to develop ultrasonic sensors and actuators using silicon micro machining, and to develop theoretical models of the behavior of these devices. A number of applications are envisaged in the fields of in-situ sensors, ranging, hydrophones, sensors for scanning atomic tips in imaging and lithography, and non destructive evaluation. (MM)

Descriptors :   *MACHINING, *ULTRASONICS, *HYDROPHONES, *ELECTROACOUSTIC TRANSDUCERS, NONDESTRUCTIVE TESTING, TUNNELING(ELECTRONICS), DISPLACEMENT, THIN FILMS, SEMICONDUCTORS, ETCHING, MICROSCOPY, LITHOGRAPHY, SILICON, MICROELECTRONICS, ACTUATORS, UNDERWATER ACOUSTICS, ACOUSTIC DETECTORS.

Subject Categories : Electrical and Electronic Equipment
      Acoustics

Distribution Statement : APPROVED FOR PUBLIC RELEASE