Accession Number : ADA299097
Title : High-Thermal-Conductivity AIN Packages for High-Temperature Electronics.
Descriptive Note : Final rept. 1 Sep 94-31 Aug 95,
Corporate Author : QUEST INTEGRATED INC KENT WA
Personal Author(s) : Savrun, E. ; Sarikaya, M. ; Pearsall, T. P.
PDF Url : ADA299097
Report Date : SEP 1995
Pagination or Media Count : 56
Abstract : A novel metallization for aluminum nitride substrates to package silicon carbide integrated circuits for use at temperatures of 600 deg C and above was investigated. Chemical equilibrium calculations were used to determine the chemical compatibility of several refractory and transition metal disilicides with AlN and SiC. Tungsten disilicide, niobium disilicide, and titanium disilicide were selected for diffusion couple and thin film deposition studies. AlN-WSi2-SiC, AlN-NbSi2-SiC, and AlN-TiSi2-SiC diffusion couples were formed at 1000 deg C and 1200 deg C. WSi2, NbSi2, and TiSi2 thin films were deposited by RF sputtering on AIN substrates and heat treated at 900 deg C, 1000 deg C, and l200 deg C in an argon atmosphere, while WSi2 thin film was deposited on a single crystal SiC wafer and heat treated at 900 deg C. Sheet resistivities were measured, and interfaces were characterized by scanning and transmission electron microscopy imaging, electron diffraction, and energy dispersive x ray microanalysis spectroscopy. The results show that metal silicides appear to be promising as metallization for aluminum nitride for use at 600 deg C and above.
Descriptors : *THERMAL CONDUCTIVITY, *CIRCUIT INTERCONNECTIONS, *REFRACTORY MATERIALS, ELECTRONICS, ALUMINUM COMPOUNDS, CHEMICALS, HIGH TEMPERATURE, THIN FILMS, COMPATIBILITY, SINGLE CRYSTALS, SUBSTRATES, NITRIDES, ELECTRON MICROSCOPY, TRANSMITTANCE, DEPOSITION, ELECTRICAL RESISTANCE, ARGON, ELECTRON DIFFRACTION, SPUTTERING, SILICON CARBIDES, CHEMICAL EQUILIBRIUM, SILICIDES, ATMOSPHERES, TITANIUM COMPOUNDS, NIOBIUM COMPOUNDS, TUNGSTEN COMPOUNDS.
Subject Categories : Electrical and Electronic Equipment
Ceramics, Refractories and Glass
Distribution Statement : APPROVED FOR PUBLIC RELEASE