Accession Number : ADA299180

Title :   Commercialize an Atomic Absorption System Based on Frequency-Doubled Tunable Diode Lasers for Rate Monitoring, Process Control and Spectroscopy of Physical Vapor Deposition,

Corporate Author : FOCUSED RESEARCH INC SUNNYVALE CA

Personal Author(s) : Levenson, Marc D.

PDF Url : ADA299180

Report Date : 31 MAY 1995

Pagination or Media Count : 5

Abstract : The contracted program to develop an atomic absorption vapor monitoring system began as scheduled on 9/1/94. Initial efforts focused on spectroscopic monitoring of low density yttrium vapor using a fundamental frequency laser. A test-bed system for frequency doubling was assembled. Parts were ordered for the construction of the prototype system. jg p.2

Descriptors :   *DIODES, *TUNABLE LASERS, *MONITORING, *SPECTROSCOPY, *RATES, *VAPOR DEPOSITION, *ABSORPTION, *ATOMIC PROPERTIES, *YTTRIUM, *FREQUENCY MULTIPLIERS, FREQUENCY, CONTROL, TEST BEDS, PHYSICAL PROPERTIES, PROCESSING, PROTOTYPES, SEMICONDUCTOR LASERS, SEMICONDUCTOR DIODES, LOW DENSITY.

Subject Categories : Physical Chemistry
      Inorganic Chemistry
      Electrical and Electronic Equipment
      Lasers and Masers
      Atomic and Molecular Physics and Spectroscopy

Distribution Statement : APPROVED FOR PUBLIC RELEASE