Accession Number : ADA299180
Title : Commercialize an Atomic Absorption System Based on Frequency-Doubled Tunable Diode Lasers for Rate Monitoring, Process Control and Spectroscopy of Physical Vapor Deposition,
Corporate Author : FOCUSED RESEARCH INC SUNNYVALE CA
Personal Author(s) : Levenson, Marc D.
PDF Url : ADA299180
Report Date : 31 MAY 1995
Pagination or Media Count : 5
Abstract : The contracted program to develop an atomic absorption vapor monitoring system began as scheduled on 9/1/94. Initial efforts focused on spectroscopic monitoring of low density yttrium vapor using a fundamental frequency laser. A test-bed system for frequency doubling was assembled. Parts were ordered for the construction of the prototype system. jg p.2
Descriptors : *DIODES, *TUNABLE LASERS, *MONITORING, *SPECTROSCOPY, *RATES, *VAPOR DEPOSITION, *ABSORPTION, *ATOMIC PROPERTIES, *YTTRIUM, *FREQUENCY MULTIPLIERS, FREQUENCY, CONTROL, TEST BEDS, PHYSICAL PROPERTIES, PROCESSING, PROTOTYPES, SEMICONDUCTOR LASERS, SEMICONDUCTOR DIODES, LOW DENSITY.
Subject Categories : Physical Chemistry
Electrical and Electronic Equipment
Lasers and Masers
Atomic and Molecular Physics and Spectroscopy
Distribution Statement : APPROVED FOR PUBLIC RELEASE