Accession Number : ADA299752

Title :   Environmentally Acceptable Photoresist Processing for Integrated Circuit Manufacture.

Descriptive Note : Final rept.,

Corporate Author : PHASEX CORP LAWRENCE MA

Personal Author(s) : Wetmore, Paula M.

PDF Url : ADA299752

Report Date : 01 APR 1995

Pagination or Media Count : 41

Abstract : Tbis is the final report of work carried out on Contract No. NOO()14-94-C-()235, Environmentally Acceptable Photoresist Processing for Integrated Circuit Manufacture.

Descriptors :   *ACCEPTANCE TESTS, *MANUFACTURING, *INTEGRATED CIRCUITS, *ENVIRONMENTAL TESTS, *PHOTORESISTORS, PHASE TRANSFORMATIONS, PROCESSING, HIGH TEMPERATURE, REPORTS, COPOLYMERS, GASES, IMAGES, FLUIDS, SUPERCRITICAL FLOW, SOLUBILITY, CARBON DIOXIDE, COMPOSITION(PROPERTY).

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE