Accession Number : ADA301474
Title : Pulsed Laser Deposition Improvements by Self-Directed Control.
Descriptive Note : Interim rept. Jun 94-May 95,
Corporate Author : FEDERAL ENERGY REGULATORY COMMISSION ATLANTA GA
Personal Author(s) : Laube, Samuel J.
PDF Url : ADA301474
Report Date : MAY 1995
Pagination or Media Count : 26
Abstract : Improvements in material thin coatings for the year 2000 and beyond require a radical new approach to deposition processes. Pulsed Laser Deposition (PLD) is one such deposition process which offers deposition of complex materials currently not possible with other deposition methods. Unfortunately, it is not enough to control thin film material composition, but thin film stoichiometry, micro and macro stress and strain, and thickness as well. It is also desirable to have a deposition process that is easy to use and is repeatable. In order to propel the current thin film deposition culture into accepting PLD as a manufacturing process, the automation of PLD is inevitable. The inception, development, and implementation of PLD automation methods is the aim of this document.
Descriptors : *THIN FILMS, *PULSED LASERS, *VACUUM DEPOSITION, STRESS STRAIN RELATIONS, ABLATION, CONTROL SYSTEMS, AUTOMATION, REAL TIME, INDUSTRIAL PRODUCTION, RAMAN SPECTROSCOPY, GRAPHITE, CARBON, CHEMICAL COMPOSITION, COATINGS, PRODUCTION CONTROL, EMISSION SPECTROSCOPY, COMPUTER AIDED MANUFACTURING, QUALITY ASSURANCE, ELECTRON SPECTROSCOPY, STOICHIOMETRY, ION DENSITY, POLYCRYSTALLINE, ULTRAVIOLET LASERS.
Subject Categories : Lasers and Masers
Mfg & Industrial Eng & Control of Product Sys
Coatings, Colorants and Finishes
Distribution Statement : APPROVED FOR PUBLIC RELEASE