Accession Number : ADA302007
Title : Virtual Prototyping Tools for Semiconductor Fabrication Equipment.
Descriptive Note : Final rept. 28 Jun 93-15 Sep 95,
Corporate Author : CFD RESEARCH CORP HUNTSVILLE AL
Personal Author(s) : Krishnan, Anantha ; Lowry, S. A. ; Harrand, V. J.
PDF Url : ADA302007
Report Date : SEP 1995
Pagination or Media Count : 132
Abstract : This report documents the creation of a Virtual Prototyping software package under a Phase II SBIR study titled "Virtual Prototyping Tools for Semiconductor Fabrication Equipment". The project successfully developed and integrated software tools from a variety of disciplines (such as CAD/CAM, Fluid Dynamics, Graphics and Database Management Systems) to form a design environment for semiconductor fabrication processes/equipment. The resulting virtual prototyping environment provides the semiconductor industry with a tool for optimizing the design and operation of fabrication equipment to meet the rapidly increasing demands of the industry.
Descriptors : *COMPUTER AIDED DESIGN, *FABRICATION, *SEMICONDUCTORS, *COMPUTER AIDED MANUFACTURING, *FLUID DYNAMICS, COMPUTER PROGRAMS, DATA BASES, INTEGRATED SYSTEMS, INDUSTRIES, DATA MANAGEMENT, OPERATION.
Subject Categories : Fabrication Metallurgy
Distribution Statement : APPROVED FOR PUBLIC RELEASE