Accession Number : ADA302157
Title : Molecular Beam Epitaxial System.
Descriptive Note : Final rept. 21 Oct 93-14 Aug 95,
Corporate Author : NORTH CAROLINA AGRICULTURAL AND TECHNICAL STATE UNIV GREENSBORO DEPT OF ELECT RICAL ENGINEERING
Personal Author(s) : Iyer, Shanthi N. ; Collis, Ward J. ; Li, Jie
PDF Url : ADA302157
Report Date : 22 NOV 1995
Pagination or Media Count : 50
Abstract : During the period of this research grant, two major equipments Molecular Beam Epitaxy (MBE) and X-ray Diffractometer systems were ordered and installed. EPI 930 MBE system that can handle wafers upto 3", substrates have been installed. The system is modular, comprising of a growth chamber, a buffer chamber, and an introduction chamber which are connected through gate valves. The growth chamber is a nine source chamber with full beam monitoring facilities, such as mass spectrometer, ionization gauge and structural monitoring facilities such as RHEED system. The system has been specially designed with optical ports for ellipsometry, ports at grazing incidence to the substrate for in situ desorption measurements, numerous small optical ports near the source flange for the individual flux measurements, and an optical port on the substrate manipulator to measure the substrate temperature from the back of the substrate. The system has the necessary safety features namely, safety interlock system, back up power supply for the group III cells. A closed loop liquid nitrogen system has been installed for the liquid nitrogen transfer to the MBE cryopanel. The growth system is automated by the Molly software package. A Bede 200/D(3) High Resolution X-ray Diffractometer system has been installed. The system has a resolution of 12 arc seconds and is computer software controlled. jg p1
Descriptors : *X RAY DIFFRACTION, *EPITAXIAL GROWTH, *DIFFRACTOMETERS, *MOLECULAR BEAM EPITAXY, COMPUTER PROGRAMS, BUFFERS, SOURCES, MEASUREMENT, OPTICAL PROPERTIES, TEMPERATURE, MONITORING, STRUCTURAL PROPERTIES, FLUX(RATE), SUBSTRATES, REFLECTION, HIGH ENERGY, FLANGES, SAFETY, MASS SPECTROMETERS, ELLIPSOMETERS, WAFERS, LIQUID NITROGEN, ELECTRON DIFFRACTION, DESORPTION, MANIPULATORS, IONIZATION GAGES, CHAMBERS, GRAZING, GATE VALVES.
Subject Categories : Inorganic Chemistry
Atomic and Molecular Physics and Spectroscopy
Distribution Statement : APPROVED FOR PUBLIC RELEASE