Accession Number : ADA304319
Title : Laser Microchemical Processing Instrument.
Descriptive Note : Final rept. 15 Jan 93-14 Aug 95,
Corporate Author : REVISE INC LEXINGTON MA
Personal Author(s) : Ehrlich, Daniel
PDF Url : ADA304319
Report Date : SEP 1995
Pagination or Media Count : 12
Abstract : Revise Inc began a highly successful engineering rework service for prototyping and trimming of integrated circuits with it's Silicon Editor TM instrument. The Silicon Editor TM utilizes a low power solid-state laser and is designed for precise fine-line operations on 2-D VLSI. There has been very significant activity in adjustment of prototypes, for example, through customization of layer thicknesses, addition of layers, experimental in situ variation of mechanical structures, device release, and machining of the substrate bulk under surface micromachined structures. The laser processes also assists in the interconnection and packaging issues for MEMS. jg p1
Descriptors : *PROCESSING, *LASERS, *INSTRUMENTATION, LOW POWER, SOLID STATE LASERS, MECHANICAL PROPERTIES, MACHINING, LAYERS, STRUCTURES, INTEGRATED CIRCUITS, SUBSTRATES, CHEMISTRY, PACKAGING, MICROANALYSIS.
Subject Categories : Lasers and Masers
Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE