Accession Number : ADA307226
Title : Digital Control Design and Demonstration for Pulsed Laser Deposition of Superconducting Films.
Descriptive Note : Final rept. 30 Sep 93-30 Sep 95,
Corporate Author : TECHNICAL MANAGEMENT CONCEPTS INC BEAVERCREEK OH
Personal Author(s) : Murray, S. P.
PDF Url : ADA307226
Report Date : DEC 1995
Pagination or Media Count : 141
Abstract : The design and implementation of a new Pulsed Laser Deposition system for growing High Temperature Superconducting film at Wright Labs is described and demonstrated. The capabilities of the new system go far beyond the typical laboratory deposition setup. The important system features include real time data acquisition and storage, deposition process automation, and digital control of three key environmental variables, specifically the laser energy, substrate temperature, and chamber oxygen pressure. It is hoped that process repeatibility can be achieved through control of these environmental variables. Additional in situ measurements on plume characteristics should help increase the understanding of the PLD process in general. The effectiveness of the new system is demonstrated by the successful growth of superconducting films.
Descriptors : *CHEMICAL VAPOR DEPOSITION, *HIGH TEMPERATURE SUPERCONDUCTORS, CONTROL, DIGITAL SYSTEMS, AUTOMATION, REAL TIME, GROWTH(GENERAL), FILMS, PRODUCTION ENGINEERING, PULSED LASERS, VARIABLES, DEPOSITION, LASER APPLICATIONS, PLUMES, COPPER OXIDES.
Subject Categories : Mfg & Industrial Eng & Control of Product Sys
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE