Accession Number : ADA307989
Title : Growth, Characterization and Device Development in Monocrystalline Diamond Films.
Descriptive Note : Quarterly technical rept. 1 Jan-31 Mar 96,
Corporate Author : NORTH CAROLINA STATE UNIV AT RALEIGH
Personal Author(s) : Davis, R. F. ; Nemanich, R. J. ; Sitar, Z. ; Bozeman, S. P. ; McClure, M. T.
PDF Url : ADA307989
Report Date : MAR 1996
Pagination or Media Count : 34
Abstract : A combination of in-situ microprobe sampling and detailed chemical kinetic modeling has been employed to provide insight into the mechanisms of nucleation and growth of high quality diamond films in combustion flame CVD. Growth of high quality diamond with large area uniformity has been accomplished. The effects of substrate temperature and gas ratio on morphology and quality are reported. In-situ measurements of gas phase species are described. Calculations were performed using the CHEMKIN package. Equilibrium and premixed laminar flame simulations were performed. Diamond deposition was also performed on TiC(111) substrates by microwave plasma CVD. The diamond (111) pole figure showed a (111) fiber texture in the deposited layer. Approximately 16% of the diamond particles were oriented with the substrate. Nuclear transmutation of B to Li is being investigated for donor doping of diamond. Homoepitaxial (10)B enriched diamond films have been grown and characterized prior to irradiation using Hall measurements and Raman and photoluminescence spectroscopy. The films have been neutron-irradiated at a dose of 3x10(exp 20) n/sq cm. The samples showed an activity of approximately 3 mCi of (46)Sc when removed from the reactor, probably because of impurities in the natural diamond substrates.
Descriptors : *FILMS, *DIAMONDS, *SINGLE CRYSTALS, *CHEMICAL VAPOR DEPOSITION, *EPITAXIAL GROWTH, *NUCLEATION, *COMBUSTION, SIMULATION, MEASUREMENT, TEMPERATURE, FIBERS, MODELS, REACTION KINETICS, LAYERS, PLASMAS(PHYSICS), HALL EFFECT, PHOTOLUMINESCENCE, RAMAN SPECTROSCOPY, MORPHOLOGY, MICROWAVES, SUBSTRATES, VAPOR PHASES, IMPURITIES, GASES, PARTICLES, CHEMICAL REACTIONS, SAMPLING, MIXING, DOPING, IRRADIATION, FLAMES, TEXTURE, MICROPROBES, LAMINAR FLOW, NUCLEAR TRANSMUTATION.
Subject Categories : Physical Chemistry
Atomic and Molecular Physics and Spectroscopy
Combustion and Ignition
Distribution Statement : APPROVED FOR PUBLIC RELEASE