Accession Number : ADA308036

Title :   Ultra-Sensitive and Quantitative Profiling and Imaging of Dopants and Impurities in Semiconductors,

Corporate Author : ATOM SCIENCES INC OAK RIDGE TN

Personal Author(s) : Arlinghaus, H. F. ; Joyner, C. F. ; Tower, J. ; Sen, S.

PDF Url : ADA308036

Report Date : 1995

Pagination or Media Count : 4

Abstract : We have built a new analytical time-of-flight (TOF) instrument capable of sputter-initiated resonance ionization microprobe (SIRIMP) measurements. This instrument has the ability to obtain quantitative element concentration depth profiles and images with very high depth resolution and virtually no matrix effects. The SIRIMP technique is especially valuable for ultratrace element analysis in samples where the complexity of the matrix is a serious source of interferences. p1

Descriptors :   *QUANTITATIVE ANALYSIS, *SEMICONDUCTORS, *IMPURITIES, *PROFILES, *IMAGES, *DOPING, *HIGH SENSITIVITY, REPRINTS, NEUTRAL, ION BEAMS, ATOMS, LASER BEAMS, OXYGEN, RESONANCE, INSTRUMENTATION, IONIZATION, ARGON, MICROPROBES, SPUTTERING, MOLECULAR PROPERTIES, CHEMICAL ANALYSIS, FRAGMENTS.

Subject Categories : Inorganic Chemistry
      Physical Chemistry
      Electrical and Electronic Equipment
      Atomic and Molecular Physics and Spectroscopy

Distribution Statement : APPROVED FOR PUBLIC RELEASE