Accession Number : ADA310762
Title : Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups.
Descriptive Note : Technical rept.,
Corporate Author : CORNELL UNIV ITHACA NY BAKER LAB
Personal Author(s) : Havard, Jennifer M. ; Frechet, Jean M. ; Wynne, Kenneth J.
PDF Url : ADA310762
Report Date : 30 JUN 1996
Pagination or Media Count : 10
Abstract : A new chemically amplified polymeric imaging system based on polymers containing t-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl (vinylbenzyl)benzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. The materials exhibit very high sensitivity when exposed to deep-UV light but their application as resists for microlithography is limited by their relatively low glass transition temperature.
Descriptors : *IMAGES, *MALONATES, LOW TEMPERATURE, POLYMERS, COMPOSITE MATERIALS, STYRENES, GLASS, MICROSCOPY, COATINGS, LITHOGRAPHY, TRANSITION TEMPERATURE, BUTYL RADICALS, PHOTOLITHOGRAPHY, BENZYL RADICALS, VINYL RADICALS, HIGH SENSITIVITY.
Subject Categories : Organic Chemistry
Laminates and Composite Materials
Printing and Graphic Arts
Distribution Statement : APPROVED FOR PUBLIC RELEASE