Accession Number : ADA310762

Title :   Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups.

Descriptive Note : Technical rept.,

Corporate Author : CORNELL UNIV ITHACA NY BAKER LAB

Personal Author(s) : Havard, Jennifer M. ; Frechet, Jean M. ; Wynne, Kenneth J.

PDF Url : ADA310762

Report Date : 30 JUN 1996

Pagination or Media Count : 10

Abstract : A new chemically amplified polymeric imaging system based on polymers containing t-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl (vinylbenzyl)benzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. The materials exhibit very high sensitivity when exposed to deep-UV light but their application as resists for microlithography is limited by their relatively low glass transition temperature.

Descriptors :   *IMAGES, *MALONATES, LOW TEMPERATURE, POLYMERS, COMPOSITE MATERIALS, STYRENES, GLASS, MICROSCOPY, COATINGS, LITHOGRAPHY, TRANSITION TEMPERATURE, BUTYL RADICALS, PHOTOLITHOGRAPHY, BENZYL RADICALS, VINYL RADICALS, HIGH SENSITIVITY.

Subject Categories : Organic Chemistry
      Polymer Chemistry
      Laminates and Composite Materials
      Miscellaneous Materials
      Printing and Graphic Arts

Distribution Statement : APPROVED FOR PUBLIC RELEASE