Accession Number : ADA310973

Title :   Silicon Crystal Heating and Thermocouple Mounting Designs.

Descriptive Note : Technical rept.,

Corporate Author : PITTSBURGH UNIV PA SURFACE SCIENCE CENTER

Personal Author(s) : Nishino, H. ; Yang, W. ; Dohnalek, Z. ; Ukraintsev, V. A. ; Choyke, W. J.

PDF Url : ADA310973

Report Date : 12 JUN 1996

Pagination or Media Count : 24

Abstract : New mounting methods for a silicon crystal and a thermocouple are described. The sample mounted in this design produced a very uniform temperature distribution when resistively heated. Deviations between the silicon temperature and the mounted thermocouple temperature have been measured. Metal contamination on the surface of the sample mounted with a thermocouple by the new methods was found to be below the detection limit of Auger electron spectroscopy. In addition, the emissivity data at 0.65 micrometers for silicon as a function of temperature has been fitted to a useful equation.

Descriptors :   *MOUNTS, *THERMOCOUPLES, DETECTION, CRYSTALS, LIMITATIONS, SILICON, HEATING, CONTAMINATION, AUGER ELECTRON SPECTROSCOPY, TEMPERATURE SENSITIVE ELEMENTS, EMISSIVITY.

Subject Categories : Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE