Accession Number : ADA311619

Title :   Silicon Optoelectronics.

Descriptive Note : Final rept. May 92-Dec 95,

Corporate Author : MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF MATERIALS SCIENCE AND ENGINEERIN G

Personal Author(s) : Kimerling, L. C.

PDF Url : ADA311619

Report Date : JUN 1996

Pagination or Media Count : 168

Abstract : This silicon optoelectronics program is the first comprehensive investigation of a silicon compatible, optical interconnection technology. The objective of the program is to establish processes, compatible with integrated circuit fabrication, for the integration of photonic interconnection with silicon electronics. The diffusivity and the solubility of Er in silicon was measured and the Er-Si-O ternary phase diagram was determined. Split lot test structures confirmed that Er did not cross- contaminate adjacent wafer locations or adjacent wafers in the same lot. The contractor designed, fabricated, and tested the first Si:Er LED with sharp line electroluminescence at 1.54 microns, operating at 300K. To model device performance, the contractor developed a global theory of Er excitation by minority carrier recombination, and monolithically integrated Si:Er LEDs with waveguides and drive electronics to demonstrate the optical and electronic compatibility of Silicon Optoelectronics. The high index contrasts of Si/SiO2 provided excellent coupling efficiency with low optical loss on SOI (silicon-on-insulator) substrates. The best LED internal quantum efficiencies ranged from 1-5%. The 3 dB modulation rate cutoff for the LED/MOSFET structure was 25 kHz. An optical test bench to measure waveguide losses by the cut-back techniques was developed.

Descriptors :   *OPTICAL EQUIPMENT, *ELECTROOPTICS, *SILICON, *ERBIUM, COUPLING(INTERACTION), ELECTRONICS, MEASUREMENT, OPTICAL PROPERTIES, MODELS, EXCITATION, ELECTROLUMINESCENCE, FABRICATION, COMPATIBILITY, CHARGE CARRIERS, WAVEGUIDES, TEST EQUIPMENT, INTEGRATED CIRCUITS, SUBSTRATES, OXYGEN, LOW LOSS, INTERNAL, CIRCUIT INTERCONNECTIONS, QUANTUM EFFICIENCY, PHOTONS, LOSSES, WAFERS, CONTAMINATION, SOLUBILITY, TERNARY COMPOUNDS, DRIVES(ELECTRONICS), LIGHT EMITTING DIODES, MOSFET SEMICONDUCTORS, BENCH TESTS, SHARPNESS, SILICON ON INSULATOR.

Subject Categories : Inorganic Chemistry
      Electrooptical and Optoelectronic Devices
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE