Accession Number : ADA311752

Title :   Mathematical Processing for Simulation and Control of Semiconductor Processing.

Descriptive Note : Final rept. 30 Nov 92-14 May 96,

Corporate Author : ARIZONA STATE UNIV TEMPE

Personal Author(s) : Tsakalis, K. S. ; Courch, P. E.

PDF Url : ADA311752

Report Date : MAY 1996

Pagination or Media Count : 151

Abstract : As indicated by its title, the project had three main thrust areas, namely modeling, simulation, and control of processes that are encountered in Semiconductor manufacturing applications. The key common theme of these areas was the use of detailed, first-principles, physical models to predict the process behavior under various conditions. Such an approach is currently considered as an attractive alternative for empirical models whose validity is limited by the range of testing conditions.

Descriptors :   *COMPUTERIZED SIMULATION, *MATHEMATICAL PROGRAMMING, *COMPUTER AIDED MANUFACTURING, MATHEMATICAL MODELS, ALGORITHMS, OPTIMIZATION, ADAPTIVE CONTROL SYSTEMS, REACTION KINETICS, CHEMICAL DISSOCIATION, THIN FILMS, VERY LARGE SCALE INTEGRATION, INPUT OUTPUT PROCESSING, CHIPS(ELECTRONICS), CHEMICAL VAPOR DEPOSITION, SEMICONDUCTORS, OXIDATION, SILICON, PRODUCTION CONTROL, TEMPERATURE CONTROL, CONTROL THEORY, WAFERS, DESIGN CRITERIA, TUNGSTEN, CHEMISORPTION.

Subject Categories : Computer Programming and Software
      Mfg & Industrial Eng & Control of Product Sys
      Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE