Accession Number : ADA313763

Title :   Scanning Probe Microscope for Ultra-High Resolution Nanoscale Electron and Near-Field- Optical Lithographies and Metrology.

Descriptive Note : Final rept. 24 Nov 94-30 Nov 95,

Corporate Author : MINNESOTA UNIV MINNEAPOLIS DEPT OF ELECTRICAL ENGINEERING

Personal Author(s) : Chou, Stephen Y.

PDF Url : ADA313763

Report Date : 26 AUG 1996

Pagination or Media Count : 4

Abstract : We purchased a scanning probe microscope (SPM), that can operate as an atomic force microscope (AFM), a scanning tunneling microscope (STM), and magnetic force microscope (MFM), and have the hardware and software necessary for ultra-high resolution lithography and alignment. The equipment has played a key role to our ongoing research programs in nanostructures and nanodevices sponsored by ARO as well other agencies such as ONR, ARPA, and NSF. Using the instruments, we studied the topologies of a variety of sub-20 nm structures and the magnetic properties of magnetic nanostructures, which are a new material system and can strongly impact future magnetic recording. Finally, we have used the instrument as a lithography tool.

Descriptors :   *SCANNING ELECTRON MICROSCOPES, *PHOTOLITHOGRAPHY, PROBES, TUNNELING(ELECTRONICS), TOPOLOGY, MAGNETIC RECORDING SYSTEMS, NANOTECHNOLOGY.

Subject Categories : Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE