Accession Number : ADA315842
Title : Microelectronics and Materials Research Equipment.
Descriptive Note : Final rept. 1 Jul 93-31 Mar 96,
Corporate Author : TEXAS UNIV AT AUSTIN COLL OF ENGINEERING
Personal Author(s) : Klein, Dale E.
PDF Url : ADA315842
Report Date : 31 MAR 1996
Pagination or Media Count : 19
Abstract : This report summarizes the actions and progress in equipping the microelectronics and materials research programs at The University of Texas at Austin. The Department of Defense provided $6,000,000 towards research equipment purchases for the completion of the research facilities. The University of Texas at Austin had already invested $34 million to build a new 135,000 square foot facility and partially equipped it using $10 million. The $6.0 million of DoD funds completed the acquisition of the equipment necessary to fully utilize the new facility. The equipment has been used to conduct research in the areas of advanced epitaxial growth techniques involving remote-plasma enhanced growth, laser enhanced growth, and rapid thermal processing applied to chemical vapor deposition; advanced epitaxial growth techniques for multilayer, compound semiconductor heterostructures using molecular beam epitaxy and organometallic vapor phase epitaxy techniques; interconnect metallization; metal/polymer packaging structures; structured microwave impedance surfaces; nanoheterogeneous amorphous thin films; and spin valve effects.
Descriptors : *MATERIALS, *MICROELECTRONICS, *LABORATORY EQUIPMENT, METALS, DEPARTMENT OF DEFENSE, POLYMERS, PROCESSING, STRUCTURES, THIN FILMS, CHEMICAL VAPOR DEPOSITION, EPITAXIAL GROWTH, MICROWAVES, RESEARCH FACILITIES, AMORPHOUS MATERIALS, SEMICONDUCTORS, LASERS, SURFACES, PROCUREMENT, PACKAGING, VALVES, RESEARCH MANAGEMENT, HEAT, IMPEDANCE, MOLECULAR BEAM EPITAXY.
Subject Categories : Electrical and Electronic Equipment
Laminates and Composite Materials
Logistics, Military Facilities and Supplies
Distribution Statement : APPROVED FOR PUBLIC RELEASE