Accession Number : ADA316049

Title :   Surface Modification of Structural Ceramics by Ion Implantation Annealing: Al2O3 and Si3N4.

Descriptive Note : Final technical rept.,

Corporate Author : CALIFORNIA UNIV LOS ANGELES DEPT OF MATERIALS SCIENCE AND ENGINEERING

Personal Author(s) : Ardell, Alan J.

PDF Url : ADA316049

Report Date : 06 SEP 1996

Pagination or Media Count : 7

Abstract : The near-surface regions of polycrystalline Si3N4 were modified by ion implantation and post-implantation annealing. Metallographically polished bars and disks 3 mm in diameter and ranging in thickness from 250 to 500 micrometers were implanted of co-implanted with Al(+) ,B(+) and N(+) to fluences up to 2 x 10(exp 16) ions//sq cm, using implantation energies up to 300 keV. Some of the implanted material was post-implantation annealed at temperatures in the neighborhood of 1100 deg C. The indentation fracture toughness was found to increase by more than 15% for certain combination of fluence, implantation species and post-implantation annealing temperature.

Descriptors :   *ANNEALING, *MODIFICATION, *STRUCTURAL PROPERTIES, *ION IMPLANTATION, *SURFACES, *CERAMIC MATERIALS, *ALUMINUM OXIDES, *SILICON NITRIDES, THICKNESS, MATERIALS, ENERGY, TOUGHNESS, FRACTURE(MECHANICS).

Subject Categories : Inorganic Chemistry
      Physical Chemistry
      Ceramics, Refractories and Glass
      Thermodynamics

Distribution Statement : APPROVED FOR PUBLIC RELEASE