Accession Number : ADA316049
Title : Surface Modification of Structural Ceramics by Ion Implantation Annealing: Al2O3 and Si3N4.
Descriptive Note : Final technical rept.,
Corporate Author : CALIFORNIA UNIV LOS ANGELES DEPT OF MATERIALS SCIENCE AND ENGINEERING
Personal Author(s) : Ardell, Alan J.
PDF Url : ADA316049
Report Date : 06 SEP 1996
Pagination or Media Count : 7
Abstract : The near-surface regions of polycrystalline Si3N4 were modified by ion implantation and post-implantation annealing. Metallographically polished bars and disks 3 mm in diameter and ranging in thickness from 250 to 500 micrometers were implanted of co-implanted with Al(+) ,B(+) and N(+) to fluences up to 2 x 10(exp 16) ions//sq cm, using implantation energies up to 300 keV. Some of the implanted material was post-implantation annealed at temperatures in the neighborhood of 1100 deg C. The indentation fracture toughness was found to increase by more than 15% for certain combination of fluence, implantation species and post-implantation annealing temperature.
Descriptors : *ANNEALING, *MODIFICATION, *STRUCTURAL PROPERTIES, *ION IMPLANTATION, *SURFACES, *CERAMIC MATERIALS, *ALUMINUM OXIDES, *SILICON NITRIDES, THICKNESS, MATERIALS, ENERGY, TOUGHNESS, FRACTURE(MECHANICS).
Subject Categories : Inorganic Chemistry
Ceramics, Refractories and Glass
Distribution Statement : APPROVED FOR PUBLIC RELEASE