Accession Number : ADA320587

Title :   Nonequilibrium Plasmas: Development and Application of Bulk and Near Surface Laser Diagnostics for Plasma Processing.

Descriptive Note : Final rept. 15 Jun 92-30 Jun 96,

Corporate Author : OHIO STATE UNIV COLUMBUS DEPT OF CHEMISTRY

Personal Author(s) : Tserepi, A. ; Preppernau, B. L. ; Miller, T. A.

PDF Url : ADA320587

Report Date : OCT 1996

Pagination or Media Count : 146

Abstract : The two-photon laser induced fluorescence (TALIF) diagnostic has been developed and/or applied to plasma processing systems involving H, 0, and N atoms. Based upon TALIF data, models have been developed for the spatial and temporal variation of the absolute atomic concentrations in H2, 02, and N2 plasmas. The portability of the TALIF diagnostic has been demonstrated. Limitations of the technique due to stimulated emission and fluorescence quenching have been investigated and procedures developed to minimize their effects.

Descriptors :   *PLASMAS(PHYSICS), *PLASMA DIAGNOSTICS, LASER PUMPING, LASER INDUCED FLUORESCENCE, NITROGEN, QUENCHING, HYDROGEN, OXYGEN, TWO PHOTON ABSORPTION, NONEQUILIBRIUM FLOW, ABSORPTION SPECTRA.

Subject Categories : Plasma Physics and Magnetohydrodynamics

Distribution Statement : APPROVED FOR PUBLIC RELEASE