Accession Number : ADA321085

Title :   Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena.

Descriptive Note : Final rept. 1 Nov 95-31 Oct 96,

Corporate Author : INSTITUTE FOR POSTDOCTORAL STUDIES SCOTTSDALE AZ

Personal Author(s) : Schulte, C. R.

PDF Url : ADA321085

Report Date : 30 DEC 1996

Pagination or Media Count : 845

Abstract : The Twenty-Third Annual Conference on the Physics and Chemistry of Semiconductor Interfaces was held in Lajolla, California and the enclosed report contains papers presented.

Descriptors :   *SEMICONDUCTORS, *MICROELECTRONICS, *NANOTECHNOLOGY, SCANNING ELECTRON MICROSCOPES, SYMPOSIA, SILICON DIOXIDE, PLASMAS(PHYSICS), ELECTRON SCATTERING, CHARGE CARRIERS, NITRIDES, ELECTRON BEAMS, ANISOTROPY, VACUUM APPARATUS, MASS SPECTROMETERS, X RAY SPECTROSCOPY, BIPOLAR TRANSISTORS, SILICONES, PHOTOLITHOGRAPHY, GALLIUM ARSENIDE LASERS, MOLECULAR BEAM EPITAXY.

Subject Categories : Electrical and Electronic Equipment
      Atomic and Molecular Physics and Spectroscopy
      Particle Accelerators
      Plasma Physics and Magnetohydrodynamics

Distribution Statement : APPROVED FOR PUBLIC RELEASE