Accession Number : ADA322108
Title : Materials Processing and Manufacturing Technologies for Diamond Substrate Multichip Modules (DSMCM).
Descriptive Note : Final rept. 20 Nov 92-19 Feb 96,
Corporate Author : COLORADO STATE UNIV FORT COLLINS DEPT OF CHEMICAL ENGINEERING
Personal Author(s) : Dandy, David S.
PDF Url : ADA322108
Report Date : 26 FEB 1997
Pagination or Media Count : 15
Abstract : The research carried out in this program has focused on the analyses of the transport, kinetic, and thermodynamic processes taking place during diamond deposition in direct current and hot-filament reactors. The research carried out may be grouped into four broad categories: (1) development of multistep chemical mechanisms for the deposition of diamond, graphite, and point defects; (2) development and execution of detailed reactor-scale models; (3) development and execution of simplified, analytical reactor-scale models; and (4) development of kinetic and thermodynamic models for diamond nucleation and the early stages of growth.
Descriptors : *MANUFACTURING, *MATERIALS, *PROCESSING, *CHIPS(ELECTRONICS), *DIAMONDS, *SUBSTRATES, *MODULES(ELECTRONICS), MODELS, THERMODYNAMICS, GROWTH(GENERAL), GRAPHITE, NUCLEATION, POINT DEFECTS, DEPOSITION, TRANSPORT PROPERTIES, CHEMICAL REACTIONS, FILAMENTS, KINETICS, DIRECT CURRENT.
Subject Categories : Inorganic Chemistry
Mfg & Industrial Eng & Control of Product Sys
Electrical and Electronic Equipment
Laminates and Composite Materials
Distribution Statement : APPROVED FOR PUBLIC RELEASE