Accession Number : ADA322108

Title :   Materials Processing and Manufacturing Technologies for Diamond Substrate Multichip Modules (DSMCM).

Descriptive Note : Final rept. 20 Nov 92-19 Feb 96,

Corporate Author : COLORADO STATE UNIV FORT COLLINS DEPT OF CHEMICAL ENGINEERING

Personal Author(s) : Dandy, David S.

PDF Url : ADA322108

Report Date : 26 FEB 1997

Pagination or Media Count : 15

Abstract : The research carried out in this program has focused on the analyses of the transport, kinetic, and thermodynamic processes taking place during diamond deposition in direct current and hot-filament reactors. The research carried out may be grouped into four broad categories: (1) development of multistep chemical mechanisms for the deposition of diamond, graphite, and point defects; (2) development and execution of detailed reactor-scale models; (3) development and execution of simplified, analytical reactor-scale models; and (4) development of kinetic and thermodynamic models for diamond nucleation and the early stages of growth.

Descriptors :   *MANUFACTURING, *MATERIALS, *PROCESSING, *CHIPS(ELECTRONICS), *DIAMONDS, *SUBSTRATES, *MODULES(ELECTRONICS), MODELS, THERMODYNAMICS, GROWTH(GENERAL), GRAPHITE, NUCLEATION, POINT DEFECTS, DEPOSITION, TRANSPORT PROPERTIES, CHEMICAL REACTIONS, FILAMENTS, KINETICS, DIRECT CURRENT.

Subject Categories : Inorganic Chemistry
      Mfg & Industrial Eng & Control of Product Sys
      Electrical and Electronic Equipment
      Laminates and Composite Materials
      Thermodynamics

Distribution Statement : APPROVED FOR PUBLIC RELEASE