Accession Number : ADA323961

Title :   Polysilicon AMLCD Projector.

Descriptive Note : Final rept. 30 Jun 94-29 Feb 96,

Corporate Author : DAVID SARNOFF RESEARCH CENTER PRINCETON NJ

Personal Author(s) : Atherton, J. ; Smeltzer, R.

PDF Url : ADA323961

Report Date : MAR 1996

Pagination or Media Count : 74

Abstract : A polysilicon thin film transistor (TFT) technology integrated with information of a light shield and a pixel electrode was transferred to a commercial integrated circuit foundry and was demonstrated to be optimized for manufacturing by successful fabrication of 1280 x 1024 prototype displays. Transmission and contrast ratio values suitable for a projection light valve were achieved. The 1280 x 1024 display was designed for optimum performance with the polysilicon TFT technology. Design-for-test features were included to permit wafer-level evaluation and repair. A detailed description of the design by block, including multiplexer, sample/hold, data driver, select scanner, and timing functions, was documented. A detailed set of specifications, including electrical characteristics, timing diagrams, optical characteristics, suggested operating procedures, and pin assignments, were defined. A complete process flow that integrates an ITO technology and topographical planarization with the underlying transistor architecture was demonstrated to be fully compatible with commercial integrated circuit manufacturing facilities. In addition, an efficient, manufacturing-ready technology to introduce hydrogen into TFT for achievement of optimum on-and off-state characteristics was achieved. Key requirements for high-yield manufacturing of the light valves were identified.

Descriptors :   *THIN FILMS, *TRANSISTORS, *POLYSILICONS, OPTICAL PROPERTIES, CONTRAST, OPTIMIZATION, MANUFACTURING, PERFORMANCE(ENGINEERING), LIGHT, INTEGRATED CIRCUITS, ELECTRICAL PROPERTIES, HYDROGEN, REPAIR, SHIELDING, VALVES, YIELD STRENGTH, WAFERS, ARCHITECTURE, DESIGN CRITERIA, MULTIPLEXING, SCANNERS, KERR CELLS.

Subject Categories : Polymer Chemistry
      Electrical and Electronic Equipment
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE