Accession Number : ADA323980

Title :   Microlithographic Mask Development (MMD).

Descriptive Note : Contract summary rept.,

Corporate Author : LOCKHEED MARTIN FEDERAL SYSTEMS MANASSAS VA

Personal Author(s) : Schnur, S. G.

PDF Url : ADA323980

Report Date : 14 MAR 1997

Pagination or Media Count : 139

Abstract : During this reporting period, manufacturing focus has been on both building gold customer masks and developing the refractory mask process. Ongoing research projects are shown in Table 1 and Table 2. Completed projects are highlighted in the tables. Table 1 provides a concise, aggressive schedule to meet tighter specifications for x-ray mask performance. Each column lists by quarter the specifications for product and the beginning of projects to meet the improvements. Table 2 contains MMD objectives for the refractory metal process. The technology path by quarter comprises the goals and the learning initiated by quarter that must be met to reach these goals for the year. The learning activities are dependent upon each other. This report focuses in detail on the status of these activities.

Descriptors :   *FABRICATION, *INTEGRATED CIRCUITS, X RAYS, REFRACTORY METALS, MASKING, METROLOGY.

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE