Accession Number : ADA324533
Title : Nanometer-Scale Thermal Processing for Advanced Manufacturing (YIP'96).
Descriptive Note : Annual rept. no. 1, 1 May 96-30 Apr 97,
Corporate Author : OFFICE OF NAVAL RESEARCH ARLINGTON VA
Personal Author(s) : King, William P. ; Fletcher, Daniel A. ; Ju, Y. S.
PDF Url : ADA324533
Report Date : APR 1997
Pagination or Media Count : 8
Abstract : We have made progress on nanoscale temperature control for advanced manufacturing using two different approaches based on scanning probe technology. The first approach is NSOM-based and uses radiation interaction at the tip of a tapered, metal-coated optical fiber. This approach offers the advantage of very brief (<<1 microsecond) heating and temperature detection. To aid with the development of this approach, we have performed extensive far-field laser reflectance thermometry studies with high spatial and temporal resolution (0.5 micrometer, 10 ns). We have developed an NSOM-based facility for temperature control studies using the optical fiber. The facility directs radiation from a steady Ar ion probe laser and a pulsed Nd:YAG laser onto samples through the optical fiber. This facility has been used to demonstrate near-field laser-reflectance thermometry for the first time. We have also demonstrated the cutting of interconnect structures using radiation from the pulsed laser. Simultaneous processing and temperature detection is a major goal for the coming year. We also aim to demonstrate near-field infrared thermometry, which promises improved sensitivity and may be most useful as a diagnostics tool for the IC industry. The second approach uses Joule heating at the tip of APM cantilevers to aid with nanoscale forming and cutting processes performed using the tip. This approach offers the advantage of precise tip-surface force control. This work is being performed collaboratively with a MEMS group at Stanford (Prof. T. Kenny) and researchers at IBM Almaden (Drs. J. Mamin and D. Rugar), who have been developing related technology for data storage applications. This research effort is modeling the transient temperature field in the cantilever and has made approximate measurements of the tip temperature using electrical and laser reflectance methods.
Descriptors : *INFRARED DETECTION, *TEMPERATURE SENSITIVE ELEMENTS, SCANNING, FIBER OPTICS, YAG LASERS, SPATIAL DISTRIBUTION, PROBES, PULSED LASERS, HIGH RESOLUTION, DATA STORAGE SYSTEMS, TEMPERATURE CONTROL, REFLECTANCE, ARGON LASERS, NEAR INFRARED RADIATION.
Subject Categories : Lasers and Masers
Mfg & Industrial Eng & Control of Product Sys
Fiber Optics and Integrated Optics
Distribution Statement : APPROVED FOR PUBLIC RELEASE