Accession Number : ADA326190

Title :   Micromachined Shear Sensors for Fluid Flows.

Descriptive Note : Final rept. 1 Mar 94-31 Dec 96,

Corporate Author : MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF ELECTRICAL ENGINEERING AND COMPU TER SCIENCE

Personal Author(s) : Breuer, Kenneth S. ; Schmidt, Martin A.

PDF Url : ADA326190

Report Date : 15 MAY 1997

Pagination or Media Count : 220

Abstract : The three year program focused on the development of micromachined shear stress sensors for aerodynamic flows. The program supported a Ph.D. candidate at MIT (Aravind Padmanabhan) and resulted in the successful design and fabrication a floating element shear sensor. The sensor has been demonstrated to be the most sensitive and accurate MEMS shear sensor developed to date.

Descriptors :   *COMPUTATIONAL FLUID DYNAMICS, *OPTICAL DETECTORS, *AERODYNAMICS, AIR FLOW, TURBULENT FLOW, TURBULENT BOUNDARY LAYER, FLOW FIELDS, SHEAR STRESSES, MICROELECTRONICS, WIND TUNNEL TESTS, MICROMECHANICS, PHOTODIODES, LAMINAR FLOW, HOT WIRE ANEMOMETERS.

Subject Categories : Aerodynamics
      Fluid Mechanics
      Optical Detection and Detectors

Distribution Statement : APPROVED FOR PUBLIC RELEASE