Accession Number : ADA326245

Title :   Micro-Opto-Mechanical Systems.

Descriptive Note : Final technical rept. 21 Oct 93-31 Oct 96,

Corporate Author : CASE WESTERN RESERVE UNIV CLEVELAND OH

Personal Author(s) : Gabriel, Kaigham J.

PDF Url : ADA326245

Report Date : 08 APR 1997

Pagination or Media Count : 40

Abstract : We have finished a three year university/industry cooperative program for basic research and technology development in the area of microoptomechanical systems (MOMS). The impetus of this work came from the results of our research on microactuators as well as a review of other current research. Our program addressed two components: (1) the development of basic microoptomechanical devices which can be combined in to complex MOMS; and (2) the development of the basic processes necessary for the fabrication of these devices. The ultimate goal of this project was the development Microoptomechanical Systems (MOMS) which integrate the coordinated motions of basic microactuators, passive/active optical components, microsensors, and microelectronics in order to realize complete pre-assembled optical systems that can be mass produced at low unit cost. Such microfabricated MOMS: (1) do not need component alignment; (2) can be mass produced; (3) have high packing density; (4) can be directly integrated with electronics; and (5) should be low power, small, and light weight. We used microactuator technology to develop a family of basic microoptomechanical devices which can be utilized individually or in combination to fabricate miniature optical scanners for a variety of applications, optical interconnect switches and frequency controlled laser diodes for telecommunications and computers as examples which we have completed in this program.

Descriptors :   *ELECTRONIC SCANNERS, *MICROELECTRONICS, *MICROMECHANICS, ELECTROOPTICS, PASSIVE SYSTEMS, OPTICAL COMMUNICATIONS, BEAM SPLITTING, OPTICAL WAVEGUIDES, HIGH DENSITY, PACKING DENSITY, OPTICAL SCANNING, REPRODUCIBILITY, CANTILEVER BEAMS, BAR CODES, MINIATURE ELECTRICAL EQUIPMENT, MICROMINIATURIZATION, DIODE LASERS.

Subject Categories : Electrical and Electronic Equipment
      Electrooptical and Optoelectronic Devices

Distribution Statement : APPROVED FOR PUBLIC RELEASE